Hybrid polymer-titania waveguides for highly integrated circuits

نویسندگان

چکیده

We present an innovative waveguide based on the hybridization of a titanium dioxide nano-waveguide within polymer strip. Through simulations and design we demonstrate that sustains principally quasi-TM fundamental mode even in tight bends (radius smaller than 2 μm) light remains confined titania layer. Such waveguide, addition enabling low loss propagation is way towards efficient evanescent sensing highly integrated scheme, i.e., small footprint. also show fabrication, here electron beam lithography atomic layer deposition, can be extended easily to large scale manufacturing using nanoimprinting technology.

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ژورنال

عنوان ژورنال: Epj Web of Conferences

سال: 2022

ISSN: ['2101-6275', '2100-014X']

DOI: https://doi.org/10.1051/epjconf/202226601006